X-ray and Neutron Phase Imaging with Gratings 2017

Process challenges in the fabrication of sub-µm structures using deep X-ray lithography

13 Sept 2017, 12:30

2h

HG (ETH Zurich)

Poster Fabrication Methods Lunch break & Poster session

Speaker

Mr Abrar Faisal (Karlsruhe Institute of Technology, Germany)