12–15 Sept 2017
ETH Zurich
Europe/Zurich timezone

Feasibility test of the high aspect-ratio grating by ALD process for the X-ray interferometer

13 Sept 2017, 12:30
2h
HG (ETH Zurich)

HG

ETH Zurich

Rämistrasse 101 8092 Zurich Switzerland
Poster Fabrication Methods Lunch break & Poster session

Speakers

Mr Seho Lee (Pusan National University)Prof. Seung Wook Lee (Pusan National University)

Authors

Mr Seho Lee (Pusan National University) Prof. Seung Wook Lee (Pusan National University)

Co-authors

Dr Chi Won Ahn (Department of Nano-Structured Materials Research, National NanoFab Center (NNFC)) Mr Tae-Eun Song (Department of Nano-Structured Materials Research, National NanoFab Center (NNFC))

Presentation materials

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