12–15 Sept 2017
ETH Zurich
Europe/Zurich timezone

Electrochemically detecting photoresist development endpoint for HAR grating microfabrication

13 Sept 2017, 12:30
2h
HG (ETH Zurich)

HG

ETH Zurich

Rämistrasse 101 8092 Zurich Switzerland
Poster Fabrication Methods Lunch break & Poster session

Speaker

Mr Christian L. Arrington (Sandia National Laboratories)

Author

Mr Christian L. Arrington (Sandia National Laboratories)

Co-authors

Dr Amber L. Dagel (Sandia National Laboratories) Andrew Hollowell (Sandia National Laboratories) Dr Carlos Perez (Sandia National Laboratories) Dr Dawit G. YEMANE (Center for Advanced Research CAMD at Louisiana State University) Dr Jamin Pillars (Sandia National Laboratories) Dr Jonathan J. Coleman (Sandia National Laboratories) Mr Patrick Finnegan (Sandia National Laboratories) Dr Varshni Singh (Center for Advanced Research CAMD at Louisiana State University)

Presentation materials

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