Speaker
Description
In mobile magnetoencephalography (MEG) systems, hundreds of atomic magnetometer sensor heads are typically deployed, making the miniaturization of atomic magnetometers essential. The coils used for spin modulation and magnetic‐field control are critical components of these devices. Here, using microelectromechanical systems (MEMS) technology, we have designed and fabricated a three‐dimensional bi‐planar coil with compact dimensions of 9 mm × 8 mm, as well as a heating coil measuring 9 mm × 6 mm. By combining femtosecond laser welding with MEMS processes, we also produced an alkali‐metal vapor cell of only 6 mm × 4 mm × 3 mm. Building on the miniaturization of these components, we developed an integrated, micro single‐beam spin‐exchange relaxation‐free (SERF) atomic magnetometer. This device combines the microfabricated bi‐planar coil, the microfabricated heater chip, and the microfabricated alkali‐metal vapor cell, and incorporates both a pump and a probe optical path. The probe housing, fabricated by laser sintering of glass‐fiber material—measures just 43 mm × 12 mm × 15 mm, achieving an internationally leading level of integration among comparable magnetometers.
